JPH01142833U - - Google Patents
Info
- Publication number
- JPH01142833U JPH01142833U JP3826888U JP3826888U JPH01142833U JP H01142833 U JPH01142833 U JP H01142833U JP 3826888 U JP3826888 U JP 3826888U JP 3826888 U JP3826888 U JP 3826888U JP H01142833 U JPH01142833 U JP H01142833U
- Authority
- JP
- Japan
- Prior art keywords
- pressure sensor
- diaphragm
- semiconductor pressure
- semiconductor
- case
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 8
- 239000010409 thin film Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 239000011521 glass Substances 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3826888U JPH01142833U (en]) | 1988-03-25 | 1988-03-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3826888U JPH01142833U (en]) | 1988-03-25 | 1988-03-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01142833U true JPH01142833U (en]) | 1989-09-29 |
Family
ID=31264825
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3826888U Pending JPH01142833U (en]) | 1988-03-25 | 1988-03-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01142833U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016004016A (ja) * | 2014-06-19 | 2016-01-12 | 富士電機株式会社 | 二重ダイアフラム式圧力センサ |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5226942U (en]) * | 1975-08-18 | 1977-02-25 |
-
1988
- 1988-03-25 JP JP3826888U patent/JPH01142833U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5226942U (en]) * | 1975-08-18 | 1977-02-25 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016004016A (ja) * | 2014-06-19 | 2016-01-12 | 富士電機株式会社 | 二重ダイアフラム式圧力センサ |
| US9733140B2 (en) | 2014-06-19 | 2017-08-15 | Fuji Electric Co., Ltd. | Double diaphragm type pressure sensor |